This book presents a basic introduction to micromechanisms and microactuators, particularly to their basic configurations and design. This book fills the persisting gap in the published literature on the mechanical manipulative aspects of micromechanisms. It also helps in offering specialized introductory courses on micromechanisms and microactuators not as part of MEMS sensing devices, but as mechanical manipulative systems. The level of the book is suitable for use in both undergraduate and introductory graduate programmes. The book presents an overview of miniaturization and scaling laws, basic design principles of micro-sized mechanisms and actuators, micro-fabrication processes, and some futuristic issues. The volume contains a large number of figures and illustrations for easy understanding by the readers. It will also be useful to researchers and professionals looking for an introduction to the topic.
This book contains applications of micromechanisms and microactuators in several very modern technical fields such as mechatronics, biomechanics, machines, micromachines, robotics and apparatuses. In connection with its topic, the work combines the theoretical results with experimental tests on micromechanisms and microactuators. The book presents the most recent research advances in Machine and Mechanisms Science. It includes the accepted reviewed papers of researchers specialized in the topics of the conference: microactuators and micro-assembly, micro sensors involving movable solids, micro-opto-mechanical devices, mechanical tools for cell and tissue studies, micromanipulation and micro-stages, micro-scale flight and swimming, micro-robotics and surgical tools, micron-scale power generation, miniature manufacturing machines, micromechatronics and micro-mechanisms, biomechanics micro and nano scales and control issues in microsystems. The presented applications of micromechanisms and microactuators in many technical fields will interest industrial companies and encourage scientifical knowledge and cooperation between academia and industry.
This book brings together investigations which combine theoretical and experimental results related to such systems as capsule micromechanisms, active micro catheters, nanotube vascular stents, mechanisms for micromilling, different compliant mechanisms including grippers and compliant systems with actuators and sensors, microrobots based on vibrations, tactile sensors, tooth brackets, compliant valves, and space reflectors. This volume contains twenty-two contributions from researchers from ten countries, represented at the 4th Conference on Microactuators and Micromechanisms, which was held in 2016 in Ilmenau, Germany. The aim of the conference was to provide a special opportunity for a know-how exchange and collaboration in various disciplines concerning systems pertaining to micro-technology. This Conference was organized under the patronage of IFToMM (International Federation for the Promotion of Mechanism and Machine Science).
This book contains selected papers presented at MAMM 2010, the First Workshop on Microactuators and Micromechanisms. This workshop has brought together scientists, industry experts and students and has provided a special opportunity for know-how exchange and collaboration in various disciplines referring to microsystems technology. The conference was organized by the Technical Committees of Mechanical Transmissions and Micromachines under the patronage of IFToMM, the International Federation for the Promotion of Mechanism and Machine Science.
This volume deals with topics such as mechanism and machine design, biomechanics and medical engineering, gears, mechanical transmissions, mechatronics, computational and experimental methods, dynamics of mechanisms and machines, micromechanisms and microactuators, and history of mechanisms and transmissions. Following MeTrApp 2011 and 2013, held under the auspices of the IFToMM, these proceedings of the 3rd Conference on Mechanisms, Transmissions and Applications offer a platform for original research presentations for researchers, scientists, industry experts and students in the fields of mechanisms and transmissions with special emphasis on industrial applications in order to stimulate the exchange of new and innovative ideas.
This book provides an extended overview and fundamental knowledge in industrial automation, while building the necessary knowledge level for further specialization in advanced concepts of industrial automation. It covers a number of central concepts of industrial automation, such as basic automation elements, hardware components for automation and process control, the latch principle, industrial automation synthesis, logical design for automation, electropneumatic automation, industrial networks, basic programming in PLC, and PID in the industry.
Micro Electro Mechanical Systems (MEMS) is already about a billion dollars a year industry and is growing rapidly. So far major emphasis has been placed on the fabrication processes for various devices. There are serious issues related to tribology, mechanics, surfacechemistry and materials science in the operationand manufacturingof many MEMS devices and these issues are preventing an even faster commercialization. Very little is understood about tribology and mechanical properties on micro- to nanoscales of the materials used in the construction of MEMS devices. The MEMS community needs to be exposed to the state-of-the-artoftribology and vice versa. Fundamental understanding of friction/stiction, wear and the role of surface contamination and environmental debris in micro devices is required. There are significantadhesion, friction and wear issues in manufacturing and actual use, facing the MEMS industry. Very little is understood about the tribology of bulk silicon and polysilicon films used in the construction ofthese microdevices. These issues are based on surface phenomenaand cannotbe scaled down linearly and these become increasingly important with the small size of the devices. Continuum theory breaks down in the analyses, e. g. in fluid flow of micro-scale devices. Mechanical properties ofpolysilicon and other films are not well characterized. Roughness optimization can help in tribological improvements. Monolayers of lubricants and other materials need to be developed for ultra-low friction and near zero wear. Hard coatings and ion implantation techniques hold promise.
A promising long-term evolution of surgery relies on intracorporeal microrobotics. This book reviews the physical and methodological principles, and the scientific challenges to be tackled to design and control such robots. Three orders of magnitude will be considered, justified by the class of problems encountered and solutions implemented to manipulate objects and reach targets within the body: millimetric, sub-millimetric in the 10- 100 micrometer range, then in the 1-10 micrometer range. The most prominent devices and prototypes of the state of the art will be described to illustrate the benefit that can be expected for surgeons and patients. Future developments nanorobotics will also be discussed.
In ten sections this book describes the principles and technology of Micro Mechanical Systems. Section one is a general introduction to the historical background and the parallels to microelectronics, reviewing the motivation for microsystems, and discussing microphysics and design and the evolution from microcomponents to microsystems. Section two covers the areas of photolithographic microfabrication, basic concepts of planar processing, materials, and processes. Section three looks at micromachining by machine tools, its history, basic principles and preparation methods. Section four discusses tribological aspects of microsystems. Section five covers fabrication, performance and examples of silicon microsensors. Section six looks at electric and magnetic micro-actuators for micro-robots. Section seven covers energy source and power supply methods. Section eight covers controlling principles and methods of micro mechanical systems and section nine gives examples of microsystems and micromachines. The final section discusses the future problems and outlook of micro mechanical systems.
Proceedings of SPIE present the original research papers presented at SPIE conferences and other high-quality conferences in the broad-ranging fields of optics and photonics. These books provide prompt access to the latest innovations in research and technology in their respective fields. Proceedings of SPIE are among the most cited references in patent literature.